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Development and Applications of MEMS Components
This article provides the results of the MEMS (MicroElectroMechanical Systems) components studies. The design considerations and manufacturing techniques of the silicon-based MEMS components are considered. Results of the experimental characterization of the fabricated prototypes are provided. Furthermore, discussion related to the future development of the MEMS components is also presented.
Авторы
Тэги
microelectromechanical systems (MEMS)
microelectromechanical resonators
SCREAM technology
microgyroscopes
inertial navigation
pedestrian navigation.
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